SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4683
SNARF for: Revisions to SEMI S2 related to chemical exposure

Originating Global Technical Committee: EH&S
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: S2 Chemical Exposure Task Force

1. Rationale: Industrial hygiene section 23 requires clarification to insure consistent technical interpretation by equipment suppliers, end-users and third-party evaluators.

The review and clarification of section 23 paragraphs will benefit equipment suppliers, end-users and third-party evaluators that are reviewing the chemical exposure criteria. The benefit will be in providing consistent and updated chemical conformance criteria.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
III: Difficult - Limited expertise and resources exist and/or achieving consensus difficult

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Conformance to industrial hygiene (IH) methods and exposure limits detailed in S2 section 23 require clarification to insure consistent application for:
1. OEL values (i.e., TWAs, STELs and Ceiling values)
2. Comparison of OEL to real-time instrumentation peak values (i.e., Note 123)
3. 1% OEL for normal operations; 25% for maintenance and fault conditions
4. Consideration of Section 23 and section 22 and S6 relationship
5. Other practical issues related to chemical exposure and section 23

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 11/06/2008b. 1st Draft by: 04/01/2009
c. Preballot by: d. Technical Ballot by: 10/01/2009
e. Committee Approval By:04/01/2011

Safety Considerations:
The resulting document is expected to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on November 6, 2008