SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/07/2012Revised (if Applicable): 02/09/2015

Document Number: 5556
SNARF for: Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Revisions Related to Section 19 Seismic Protection

Originating Global Technical Committee: EH&S
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Seismic Protection Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
After S2-0200 publication, section 19 has not been updated. Seismic Section of UBC has not been updated while related standards have been formally released and became widely used in the United States.
The TF originally intended to adopt a combination of Standard (or code) and known semiconductor manufacturing location that would result in the most stringent set of values for the new design load criteria. After careful examination of available Standards/Codes and calculation of seismic acceleration factors based on those reference, however, TF found a simplistic “most stringent set of values” didn’t exist, while current S2 criteria gave relatively conservative value for every factor in comparison to other reference. Furthermore, considering that any equipment properly designed and anchored based on current S2 seismic design criteria did not be overturned or become the origin of fire, TF concluded that current S2 criteria should be preserved. Instead providing example of seismic design load based on Standards/Codes applicable for known semiconductor manufacturing location would be valuable for the users of SEMI S2

b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
To modify
Section 19 Seismic Protection
Related Information 4: Seismic Protection
Delete ““Derivation of 19, Seismic Load Guidelines”.
Addition of examples of seismic design load based on Standards/Codes applicable for known semiconductor manufacturing location in RI

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/01/2012b. 1st Draft by: 05/01/2013
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/10/2015
e. TC Chapter Approval By:04/17/2015

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
NA EHS Committee, TW EHS Committee, NA Seismic Liaison TF
(Intercommittee ballots will be issued to Facility Committee.)

b. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:
This SNARF was approved extending project period by 2016/09/23 at the meeting on 2015/09/24.

Ballot passed and pulbished closed

8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS02/09/2015
Recorded in TC Minutes
Attach Pictures and Files here: