SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5556
SNARF for: Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Revisions Related to Section 19 Seismic Protection


Originating Global Technical Committee: EH&S
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: Seismic Protection Task Force


1. Rationale: After S2-0200 publication, section 19 has not been updated. Seismic Section of UBC has not been updated while related standards have been formally released and became widely used in the United States. In Japan, we experienced significant earthquakes such as Great East Japan Earthquake or Niigata earthquake. Many people suggested the necessity of updating section 19 of S2. The TF has decided to start actions for revision to Section 19 of SEMI S2.
Need to update design load in seismic event for SEMI S2, because design load that referenced UBC is already abolished.
Designers of SME are able to design latest safety guideline for seismic protection.

Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
This documentation activity covers changes in section 19 of SEMI S2 and Related Information 4
To change Design Load based onASCE7-10.
To modify related Information 4 based on ASCE-10.


b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 12/01/2012b. 1st Draft by: 05/01/2013
c. Preballot by: d. Technical Ballot by: 09/01/2013
e. Committee Approval By:12/01/2013




Safety Considerations:
The resulting document is expected to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on December 7, 2012