SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
01/12/2011
Revised (if Applicable):
Name of Task Force (TF):
3DS-IC Bonded Wafer Stacks
Global Technical Committee:
3DS-IC
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
The BWS Task Force will actively create and/or modify specifications that reflect bonded wafer stacks parameters and the wafer bonding process.
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2. Scope:
(Define the specific activities that the TF will conduct.)
* Identify new wafer parameters that reflect adequate ranges for bonded wafer stacks
* Modify/create document to reflect adequate ranges for bonded wafer stacks
* Identify other SEMI standards that are adversely affected by BWS parameters
* Update referenced standards: create/modify standards to reflect BWS parameters
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Global 3DS-IC Committee
Global Silicon Committee
Global MEMS Committee
Will liaise with appropriate regional committees as they are formed
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4. Formation Date:
(TF formed on)
Task Force formed on:
01/25/2011
Task Force approved by Committee/GCS on:
01/25/2011
5. Comments
None.