SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 08/12/2004

Revised (if Applicable): 11/02/2015

Name of Task Force (TF): MEMS Material Characterization Task Force

Global Technical Committee: MEMS / NEMS

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Develop Test Methods and related documents for characterizing properties of materials and processes used in MEMS devices.
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2. Scope: (Define the specific activities that the TF will conduct.)
Current interest areas include:
a. MEMS film properties
b. Wafer-wafer bond interfaces
c. MEMS processes
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
None at present.
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4. Formation Date:(TF formed on)

Task Force formed on: 05/06/2004
Task Force approved by Committee/GCS on: 07/12/2004

5. Comments
TF reactivated 11/02/2015 with Rich Allen as new TF Leader and to include "processes" into charter/ scope section.