SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Revised (if Applicable):
Name of Task Force (TF):
MEMS Material Characterization
Global Technical Committee:
MEMS / NEMS
Originating Technical Committee Region:
(State the objective of the proposed TF.)
Develop Test Methods and related documents for characterizing properties of materials and processes used in MEMS devices.
(Define the specific activities that the TF will conduct.)
Current interest areas include:
a. MEMS film properties
b. Wafer-wafer bond interfaces
c. MEMS processes
3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
None at present.
4. Formation Date:
(TF formed on)
Task Force formed on:
Task Force approved by Committee/GCS on:
TF reactivated 11/02/2015.