SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 12/02/2009

Revised (if Applicable):

Name of Task Force (TF): Gallium Nitride (GaN) Task Force

Global Technical Committee: Compound Semiconductor Materials

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
To develop and publish a specification for round, polished GaN wafers.
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2. Scope: (Define the specific activities that the TF will conduct.)
To develop a specification for round, polished Gallium Nitride wafers, including various diameters. It will cover thickness, flat locations and lengths, laser marking location, surface orientation options, bow, TTV, etc.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
None
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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on: 05/19/2010

5. Comments
None.