SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 08/26/2019Revised (if Applicable):

Document Number: 6589
SNARF for: Revision to SEMI HB4-0913 (Reapproved 0419), Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)

Originating Global Technical Committee: HB-LED
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: HB-LED Equipment Communication Interface
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEM HB4-0913 (Reapproved 0419) Section 7.5.1.5 defines some equipment behaviors and host operations for the whole process program. However, it cannot meet some new requirements as the development of HB-LED industry.

The setting and operation of recipes in LED manufacturing are different from that of IC manufacturing. One LED process recipe usually takes several hours, while it takes less than twenty minutes for IC processing. Besides modifying recipe before executing, it is often required that the executing recipe be modified with the changes taking effect in subsequent steps. The recipe modification generally includes three types:

Whole process recipe body updating.
Setting value changes for one or more parameters in a process recipe permanently.
Setting value changes for one or more parameters for current job.

Each LED FAB and equipment vendor may have their own methods and using non-standard streams and/or functions to implement the requirements, which makes the integration between FAB host and equipment software difficult.

Therefore, it is necessary to revise the Section 7.5.1.5 of SEMI HB4-0913 (Reapproved 0419) to support the new requirements of managing the recipe during LED processing. The revision can effectively prevent the different interpretations of the HB-LED FABs and equipment makers. It will clarify the definitions of uncertain usage and guide the FABs and equipment makers.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The proposed revision to Section 7.5.1.5 of SEMI HB4-0913 (Reapproved 0419) include:
Recipe parameter adjustment for specific PPID or job.
The message format for host to implement the recipe parameter adjustment.
The adjustment result report to host and related information.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 08/29/2019b. 1st Draft by: 09/01/2019
c. (Optional) Informational Ballot by: 09/01/2020d. Letter Ballot by: 10/01/2020
e. TC Chapter Approval By:06/01/2021

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 2019/9/11
Member Review End Date: 2019/9/25

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/27/2019
Recorded in TC Minutes10/01/2019

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on