SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/10/2018Revised (if Applicable):

Document Number: 6441
SNARF for: Revision to add a New Subordinate Standard, Test Method for Determination of Particle Contribution of Gas Delivery System and its Components through Pulsed Testing, to SEMI F70-0611 (Reapproved 0517), Test Method for Determination of Particle Contribution of Gas Delivery System

Originating Global Technical Committee: Gases
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Filters and Purifiers Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Many valves in the gas supply lines and tools are switched many times and are related to wafer cycles. For these types of valves, a base cleanliness is required, but also a (very) low contribution as a result of the switching. Switching means mechanical opening and closing, resulting in impact and (micro-)wear. Particles that are generated during switching can be the main contributor to contamination during wafer handling or transport. For this purpose, the measurement of the number of particles added per switch is needed.

This activity aims to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system and its components in terms of number of particles added to gas flowing through the system from switching components


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: gas delivery system suppliers, equipment suppliers, and end-users especially for prototype testing and for design releases

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
A new subordinate standard to SEMI F70 will be introduced that focuses on dynamic (pulse) testing which measure particle contribution per switch. The proposed method applies to surface mount and conventional gas delivery systems used in semiconductor manufacturing equipment as well as the components used in such systems.

The addition of a new subordinate standard would also require changes to F70. These changes include: expanding the scope to encompass components used in these surface mount and conventional gas delivery systems; updates to the procedures, measurements, and reporting sections; as well as removing section contents related to dynamic (pulse) flow test as these are now incorporated in the new subordinate document.


b: Expected result of activity
New Subordinate Standard to an existing Standard or to a new Primary Standard to be developed concurrently with this new Subordinate Standard

For a new Subordinate Standard, identify the Primary Standard here:
F70

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/10/2018b. 1st Draft by: 08/15/2018
c. (Optional) Informational Ballot by: d. Letter Ballot by: 09/05/2018
e. TC Chapter Approval By:11/06/2018

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Gases

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

___________________________________________________________________________
7. Comments, Special Circumstances:
In Document 6441A version, title was updated

from: TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM AND ITS COMPONENTS THROUGH DYNAMIC (PULSE) TESTING

to: TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM AND ITS COMPONENTS THROUGH PULSED TESTING


Passed A&R Cycle 12-2019.
Published as: SEMI 70.1

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 07/24/2018
Member Review End Date: 08/05/2018

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
__________________________________________________________________________

9. SNARF Approval Dates:
TC Chapter or GCS08/20/2018
Recorded in TC Minutes07/10/2018

__________________________________________________________________________

10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
SNARF_Rev to add sub to F70.pdfSNARF_Rev to add sub to F70.pdf