SEMI International Standards
Date Prepared: 05/17/2011
Revised (if Applicable):

Name of Task Force (TF): Liquid-Borne Particle Counter Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
Develop a standard of the counting efficiency test method for liquid-borne particle counter which measureable particle size is smaller than 100nm.
2. Scope: (Define the specific activities that the TF will conduct.)
Main point to develop the counting efficiency test system for a liquid borne particle counter is to quantify the particle number concentration of a test sample.

Define a test condition for the counting efficiency test.

The following areas are to be addressed:
- Determine the mass concentration of original PSL particle solution.
- Determine the element for calculating the dilution ratio such as fluid, flow rate, pressure, volume, PSL concentration, etc.
- Determine the type of liquid-borne particle counter evaluated.
- Determine the type of PSL (reference material)
- Determine the cleaning method of the test circuit prior to the test for decreasing the back ground number of particles
- Determine the description of the test report

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA Liquid Chemicals Committee
UPW Filtration Efficiency Task Force

4. Formation Date:(TF formed on)

Task Force formed on: 05/17/2011
Task Force approved by Committee/GCS on: 05/11/2011