SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
11/04/2019
Revised (if Applicable):
Name of Task Force (TF):
Chemical Mechanical Planarization Consumables (CMP-C) Task Force
Global Technical Committee:
Liquid Chemicals
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
Currently, there are no standards for measuring and reporting parameters of the consumables used in the CMP process. There is a definite need to develop standards on how to measure and report consumables’ parameters consistently. The first task will be to standardize the measurement and the reporting of CMP pad hardness.
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2. Scope:
(Define the specific activities that the TF will conduct.)
To standardize the measurements and reporting of quality parameters of CMP consumables.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
none
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4. Formation Date:
(TF formed on)
Task Force formed on:
11/05/2019
Task Force approved by Committee/GCS on:
5. Comments
None.
