SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/02/2000

Revised (if Applicable): 10/30/2007

Name of Task Force (TF): GEM 300 Task Force

Global Technical Committee: Information & Control

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
The charter of this task force is:
1) to maintain and improve the following SEMI equipment automation software standards:
- E5
- E30
- E37 (and E37.1)
- E39
- E40
- E87
- E90
- E94
2) to collaborate with other task forces dealing with these 300-mm standards.
3) to make related information for implementation of these 300-mm standards.
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2. Scope: (Define the specific activities that the TF will conduct.)
The scope of this task force is limited to improvement for existing SEMI standards as noted in the charter.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Equipment Automation – Europe
GEM300 TF – Japan (I&C Japan)
Physical Interface and Carriers (PIC) Committees - NA and Japan
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4. Formation Date:(TF formed on)

Task Force formed on: 03/02/2000
Task Force approved by Committee/GCS on:

5. Comments
None.