SEMI International Standards
Date Prepared: 04/19/2012
Revised (if Applicable): 12/20/2015

Name of Task Force (TF): Seismic Protection Task Force

Global Technical Committee: EH&S
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
This task force considers technical criteria of seismic protection necessary as a SEMI Safety Guideline that suppliers and users discuss and agree upon.
2. Scope: (Define the specific activities that the TF will conduct.)
Consider design criteria, facility design criteria and documentations of seismic protection for semiconductor manufacturing equipment and similar equipment (e.g., PV manufacturing equipment). Use result of this to develop the revision document for SEMI S2 and S26 or a new safety guideline.
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Taiwan EHS Committee
NA EHS Committee

4. Formation Date:(TF formed on)

Task Force formed on: 04/19/2012
Task Force approved by Committee/GCS on: 04/19/2012

Task Force leader changed on the TC Chapter meeting during SEMICON Japan 2015