SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/24/2020Revised (if Applicable):

Document Number: 6715
SNARF for: New Standard: Guide for Measuring Particle Precursors in Ultrapure Water

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Water Management Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The IRDS roadmap has identified 3nm as the critical particle size for the next generation of semiconductor devices. Recent studies have shown that particles in these size range and larger can be formed from dissolved contaminates and polymeric materials found in solution. Recent studies have also revealed that these particles can adhere to the wafer surface during processing.

The dominate particle counting metrology used today, light-scattering, optical particle counting, has limited capabilities to measure particles below 20 nm and is unable to detect organic particles smaller than 10 nm in UPW or particle precursors. Alternative particle metrologies such as nebulization/aerosol analysis and acoustic emission particle counting have matured to the point to where they and other techniques may be suitable for online measuring of particle precursors. The focus of this document will be to establish a test procedure and guide to measure the efficacy of these new instruments to quantify particle precursor concentrations in UPW.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Ultrapure Water

c. Estimate technical difficulty of the activity.
III: Difficult - Limited expertise and resources exist and/or achieving consensus is difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Experimental work will be required to establish appropriate and representative forms of particle precursors such as low, medium, and high molecular organic that mimic precursors shed from materials such as ion exchange resin, fluoropolymer pipe and tubing and filter membrane. Once the particle precursor standards are selected, candidate instruments will be evaluated for their ability to measure the particle precursor size and concentration. Finally, a test procedure will be defined for future metrology characterization.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 01/01/2021b. 1st Draft by: 08/01/2021
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/01/2021
e. TC Chapter Approval By:12/01/2021

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 01/06/2021
Member Review End Date: 01/20/2021

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS01/22/2021
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Attach Pictures and Files here:

SNARF_Guide Particle Precursor Measurement (new).pdfSNARF_Guide Particle Precursor Measurement (new).pdfSNARF_SEMI Cxx Particle Precursor Measurement V1_LNN.docSNARF_SEMI Cxx Particle Precursor Measurement V1_LNN.doc