SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/10/2018Revised (if Applicable):

Document Number: 6451
SNARF for: Revision to SEMI C1-0310 (Reapproved 0618), Guide for the Analysis of Liquid Chemicals

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Chemical Analytical Methods Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

Semiconductor Fabs are starting to demand specifications of 50, 20, 10 and even one part-per-trillion (ppt) for trace metals in liquid chemicals.

The analysis of liquid chemicals with specifications below about 50ppt by different laboratories will not agree unless a common methodology is used to eliminate instrument and method differences across laboratories analyzing the same material.

Analytical disagreements arise because each laboratory has unique instrument conditions and preparation methods that can drastically affect the final result, where one lab says it meets specification and another says it doesn’t. Analytical disagreements are common but this is a very large problem with specifications below about 50 ppt.

The analytical differences can arise from numerous sources: sampling, sample preparation, instrument configuration, ICP-MS analysis conditions (i.e., integration times), data reduction, etc.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Liquid chemical manufacturers, Metrology instrumentation, Semiconductor manufacturers, independent laboratories

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

The scope of revision to SEMI C1 will be focused on enabling the measurement of trace metals in liquid chemicals by ICP-MS for specifications at or below 50ppt.


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/10/2018b. 1st Draft by: 03/01/2019
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/10/2019
e. TC Chapter Approval By:11/10/2019

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 7/25/2018
Member Review End Date: 08/08/2018.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS08/15/2018
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 06/24/2021
Extension Expires on06/24/2022

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