SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/24/2020Revised (if Applicable):

Document Number: 6716
SNARF for: Revision to SEMI C79-0819, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ultra Pure Water Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The IRDS roadmap has identified 3nm as the critical particle size for the next generation of semiconductor devices. Recent studies have shown that particles in these size range and larger can be formed from dissolved contaminates and polymeric materials found in solution. Recent studies have also revealed that these particles can adhere to the wafer surface during processing. Removal of these contaminates by filtration has proven to be difficult.

This revision will update to the existing test procedure based on needs identified using the document and will add additional particle and particle precursor challenge options beyond the colloidal silica currently specified. Examples of new challenge media would be poly(sodium styrenesulfate), a cation resin raw material and poly(vinylbenzyl trimethyl ammonium chloride), an anion resin raw material.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Ultrapure Water

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Experimental work will be required using the new challenge materials to determine the repeatability and effectiveness of the test guidelines. This will require support and participation from the filtration supplier base like experimental work conducted in the first revision.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 01/01/2021b. 1st Draft by: 08/01/2021
c. (Optional) Informational Ballot by: d. Letter Ballot by: 11/01/2021
e. TC Chapter Approval By:01/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SNARF one-year extension: exp Fall 2024

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 01/06/2021
Member Review End Date: 01/20/2021

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS01/22/2021
Recorded in TC Minutes01/22/2021

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 11/07/2023
Extension Expires on11/07/2024
SNARF_2020_SEMI C79 Rev 1_LNN.docSNARF_2020_SEMI C79 Rev 1_LNN.docSNARF_C79 (Rev).pdfSNARF_C79 (Rev).pdf