SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 02/13/2023Revised (if Applicable):

Document Number: 7068
SNARF for: New Standard: Specification for Equipment Data Publication

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Equipment Data Publication (EDP) Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There is a wide selection of data that can be collected from equipment and subcomponents through existing SEMI Standards interfaces (e.g., SECS/GEM, EDA/Interface A, SensorBus, etc.), industry standards interfaces (e.g., OPC, MQTT, etc.) and custom interfaces.

Currently, there is little consistency on what information the equipment or subcomponent provides, so each equipment user needs to spend time and effort to understand what data can be accessed from a particular component before it is collected, and determine if that data be sufficient for their needs (e.g., what does that data represent, what format is it reported, what is the data frequency of that content, etc.)

Defining a minimal set of data that can be acquired from the equipment and subcomponent would significantly support data collection and offline analysis efforts (e.g. analysis such as early excursion detection and prevention). This would speed up the integration process and set expectations for both the equipment user and the equipment supplier on what content data is available.

When a component implements the EDP Specification, the minimal set of data defined in EDP standards for that component are always accessible by the equipment user (i.e. that data can be consumed by the equipment user through a well-defined interface). There will be other content data that the equipment supplier exposes to the equipment user in addition to the EDP data. Equipment supplier confidential data is not specified as EDP data.

Note – EDP Standards are different than the SEMI Guide document being developed by the Equipment Edge Data Governance (EEDG) Task Force chartered under the Taiwan Information & Control Technical Committee.
• The EDP Standards focus on the content available from the equipment and subcomponents.
• The EEDG Standard will focus on providing information about the content available from the equipment, and guidance on how local storage devices (e.g., log files, databases, etc.) are organized. This Guide will not specify what content is required to be provided.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone providing data from the equipment or subcomponents through software interfaces

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This proposal suggests to create a new Primary Standard to define common infrastructure that new Equipment Data Publication Subordinate standards will use to outline specific content data for component types (e.g., etch component, vacuum pumps, chillers, etc.)

The Task Force will consider how to address the following areas:

• Investigate defining terminology for shared data and non-shared data

• Define characteristics tobe specified as part of the EDPdata (e.g. name, format, data quality, minimum expected data response) and a structure to report these characteristics (table, columns, etc.).For example, the primary standard could define a Table template that the subordinate standardwill populate with parameters that particular component will support as part of the EDP content data defined.

• Note -This Standard will not specify the specific data structure of the EDP content data to be reported.(e.g. the standard may say Parameter X is an array, but it will not specify it as an array of 5 float values.)The specific transfer mechanism used to access the EDP content data will define how the data is structured when it is transferred.

• EDP data can be parameters, events or exceptions/alarms. This content data can be provided through well-defined interfaces (e.g., SECS/GEM, EDA/Interface A, etc.) or local data sources. (e.g., files or databases). The content data could be accessed from the equipment directly or off-equipment (e.g. analysis servers)

• Investigate if specific transfer mechanisms should be defined within the EDP Standards.
o One thought is the transfer mechanism is separate from the standards specifying the required content data (to reflect equipment users’ needs and factory environment).
o Alternatively, this Specification could define characteristics of good transfer mechanism and best practices on how changes to that transfer mechanism is communicated (e.g. file format changes, how the data is encoded in a message is changed, etc.).
o The end goal is that EDP data can be consumed by the equipment supplier with minimal customizations.
o Some suppliers have stated they share data, but the file they provided is encrypted and no decryption key is provided unless there is a commercial agreement.
o Subordinate Standards may define optional requirements on how its content data is expressed through specific SEMI Standards (such as EDA/Interface A) to minimize customizations.

• Investigate common characteristics to define for a component implementing the EDP Standard to help with tracking. (e.g. component name, component version, etc.)

• Investigate if there should be a consistent mechanism defined so that a component can be identified as a top-level component or part of another component as part of the EDP data. (e.g. a Tool Component is a top level component. It includes a Chamber Component, which includes a Vacuum Component)

• Determine if there is value in defining infrastructure around requiring content data based on data characteristics, rather than specific parameters.
o It may be hard to define some content data because they are dependent on the component design or parts used in the component. E.g., depending on the RF generator used in an Etch Chamber, different parameters are available.
o EDP data attributes will include a text value that can be used to categorize the content data. Subordinate standards will define how it’s content data will be organized. (E.g. by functional purpose or Level 1, Level 2, etc.)


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2023b. 1st Draft by: 06/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/01/2023
e. TC Chapter Approval By:12/01/2023

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
I&C Global Technical Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 3/10/2023
Member Review End Date: 3/24/2023

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/09/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on