SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/09/2022Revised (if Applicable):

Document Number: 6993
SNARF for: Line-Item Revision to SEMI F98-0521, Guide for Water Reuse in Semiconductor Industry

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Water Management Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Importance of water conservation in semiconductor industry is growing, going beyond financial benefits. Growing semiconductor mega-sites often outpace the rate of development of local infrastructure, posing risks constraining ability of the site to grow. ESG (Environmental Social and Governance) driver has become the industry one mission critical requiring new approach to water management.

SEMI F98 document deals with standardizing site water management for semiconductor manufacturing facility.

IRDS (International Roadmap for Devices and Systems) has established the focused effort to define the roadmap in this space. The deliverables of this effort are expected to be finalized by the end of 2022. The learning provides valuable input into SEMI F98. The focus of this SNARF is updating KPIs (key performance indicators) for the industry. It is now apparent that the ways different companies measure water conservation are different. This results in both inconsistency in the reporting as well as different approaches to water conservation, often affecting efficiency of the results. Existing SEMI F98 KPIs have not been adopted in the industry due to their inadequacy.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The scope of this effort is to develop water reuse and water conservation KPIs that will help to drive the industry progress in water conservation. The task force will also update information in the current version of the document, as needed.

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/09/2022b. 1st Draft by: 02/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/08/2023
e. TC Chapter Approval By:04/05/2023

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

1 Line Item
6993 - passed TC Chapter review, SEMICON West 2023 

Passed A&R Cycle 08-2023 
Publishing Cycle: 0923 

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/09/2022
Recorded in TC Minutes11/09/2022

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
SNARF_F98 Revision_2022.docSNARF_F98 Revision_2022.doc