SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/17/2015Revised (if Applicable):

Document Number: 6087
SNARF for: NEW STANDARD: Test method for nitrogen content in silicon by charged particle activation analysis

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Test Method Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

JEITA established the standard for measurement of concentration of nitrogen in silicon, both by IR and CPAA, JEITA EM-3512, in 2009. It will help the Si industry as those on oxygen and carbon in silicon do.
JEITA standard documents on test method for silicon wafer are facing difficulties to be maintained due to the dissolution of corresponding JEITA committee. Those JEITA standards have been referred to by some of SEMI Standard documents. Therefore, important descriptions (or documents) in JEITA documents are required to be transferred to a new SEMI Standard. The purpose of this activity is to transfer effective descriptions from JEITA document EM-3512 to SEMI Standard document, regarding “Method for measuring nitrogen concentration in silicon crystals”.



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

This standard includes charged particle activation analysis (CPAA). That was established by the round robin measurement and calibrated by the established IR technique. All these results have already been included in the JEITA EM-3512 standard and given in Semiconductor Silicon 2002 (ECS).


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 06/01/2015b. 1st Draft by: 06/01/2016
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/01/2016
e. TC Chapter Approval By:06/01/2016

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
The copyright issue was reached an agreement to the available at SEMI by the deliberation with JEITA.

** was abolished on July 30, 2018


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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 5/15/2016
Member Review End Date: 5/29/2016

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS06/10/2016
Recorded in TC Minutes06/10/2016

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on