SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
Revised (if Applicable):

Name of Task Force (TF): Cleaning Gases

Global Technical Committee: Gases
Originating Technical Committee Region: Europe


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1. Charter: (State the objective of the proposed TF.)
New cleaning gases, for example based on F2 mixtures, are being used to clean thin film tools faster than previously used gases (C2F6, CF4) or NF3. These mixtures do not have any GWP (global warming potential). There is no current SEMI standard covering the suggested purity values for those new gas mixtures. New activity aims at filling that gap.
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2. Scope: (Define the specific activities that the TF will conduct.)
Develop standard documents to cover suggested minimum purity values for those new gas mixtures, starting with F2/N2/Ar mixtures
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 10/26/2016
Task Force approved by Committee/GCS on:

5. Comments
None.