SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: Revised (if Applicable):

Document Number: 6889
SNARF for: Line Item Revision of S23 Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: S23 Revision Global Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Two tables in Appendix 1 contain erroneous information. Correcting the errors will improve the value of the Guide.
The Guide will better express the value of the industry using Dual-Cooled Process Cooling Water (PCW-D) if a graph is provided demonstrating the efficiency difference between PCW-D and Chiller- Cooled Process Cooling Water (PCW-C).



b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: Manufacturing Equipment and Users Thereof

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1) Line Item change to S23 to correct the errors in Appendix 1 tables. The correct values for the tables have already been determined by the TF.
2) Line Item change to add a graph of PCW-C vs. PCW-D conversion factors (with a view to add it either as a note to paragraph 6.4 or as part of RI-2) if it is not otherwise added by other TC actions.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/01/2021b. 1st Draft by: 01/01/2022
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/01/2022
e. TC Chapter Approval By:03/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
The TF hopes to effect the changes described in scope by other TC actions, in which case this SNARF will be closed as soon as possible.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/09/2021
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on