SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/13/2016Revised (if Applicable): 11/09/2016

Document Number: 6051
SNARF for: Line Item Revisions to SEMI E111-1213, Mechanical Specification for a 150 mm Reticle SMIF Pod (Rsp150) Used to Transport and Store a 6 Inch Reticle

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Global PIC Maintenance Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The reticle SMIF Pod (RSP) and Load Port (LP) Interoperability TF has recently reviewed a ballot to add related information to SEMi E111, E112 and E19. During ballot adjudication we determined that the titles of above-mentioned standards do not conform with SEMI Regulations yet. We therefore propose to modify the SEMI E111 title & correct the related references as follows:

SEMI E111
SPECIFICATION FOR MECHANICAL DEFINITION OF A 150 mm RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE

A Reject for the above title change was found to be persuasive because the additional limiting phrase “Mechanical Definition of” was inappropriate as the scope of E111 includes additional properties and is not consistent with the titles of other carrier specifications. This revised SNARF is to issue a new Line-Item Ballot per the procedure in Appendix 4 of the Procedure Manual, with an additional Line Item to edit several Definitions to conform to the Style Manual.

Line Item 1 : Correct the title of SEMI E111 as indicated:

SPECIFICATION FOR A 150 mm RETICLE SMIF POD (RSP150) USED TO TRANSPORT AND STORE A 6 INCH RETICLE

Line Item 2: Correct definitions to conform to the Style Manual as indicated:

4.1.7 pellicle — a thin, optically transparent film, typically of a polymer, attached to and supported by a frame, and attached to a photomask (or reticle). Its purpose is to seal out contaminants and reduce printed defects caused by contamination in the image plane of an optical exposure system with a minimum decrease in the quality of optical transmission.[SEMI P5].

4.1.8 reticle — a mask that contains the patterns to be reproduced on a substrate; the image may be equal to or larger than the final projected image.[SEMI E30.1].

4.1.9 robotic handling flanges — horizontal projections on the top of the box for lifting and rotating the box [SEMI E100].

4.1.10 side handling flanges — horizontal projections on the sides of the pod (sides parallel to the bilateral reference plane) for lifting, transportation or positioning of the pod [SEMI 100].



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Change the title of non-conforming standards E111 to conform with SEMI Standard Regulations and to correct definitions to conform to the Style Manual.

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/15/2016b. 1st Draft by: 11/28/2016
c. (Optional) Informational Ballot by: d. Letter Ballot by: 11/30/2016
e. TC Chapter Approval By:04/05/2017

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Original SNARF was approved by TC Chapter at SEMICON West 2016 on 07/13/2016.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/09/2016
Recorded in TC Minutes11/09/2016

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
SNARF-E111_doc 6051A 20161109.docxSNARF-E111_doc 6051A 20161109.docxSNARF-E111.docxSNARF-E111.docx