SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/19/2020Revised (if Applicable): 12/03/2020

Document Number: 6859
SNARF for: Revision to SEMI E116-0518 SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING (EPT) and E116.1-0707 (Reapproved 0518) SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The E116 standard is an implementation of E10 Specification For Definition and Measurement of Equipment Reliability, Availability, And Maintainability (RAM) and Utilization. However, some of the key states from E10 are not able to be reported in a current E116 implementation. E116 does not distinguish between Production and Engineering Time. Additionally, E116 does not distinguish between Scheduled and Unscheduled Downtime. Some end users interested in E116 would like to have these states reported.

These deficiencies in E116 were reported by the Advanced Backend Factory Integration task force which is part of the North America Information & Control Committee. There seems to be interest in adopting E116 when these gaps are filled.

A few more issues in E116 have been identified during SNARF review:
1. E116 is the only standard that reports all state changes of an EPT State Model instance by only ONE collection event. Other standards use a different collection event for each transition.
2. Each EPT State Model instance is represented by a different collection event
3. Reporting of single transitions can be omitted by the attribute DisableEventOnTransition [list of 0 to 9 integers: e.g.: 1,4]. This is inconsistent with similar sate model features implemented in other standards based on the GEM standard and is essentially used to compensate for the deviation from normal GEM collection event and data variable usage.
4. ObjID is not represented by a Data Variable.
5. Changes are being make to E10. We need to make sure that E116 stays synchronized.

Originally proposed as a line item ballot as SNARF 6647, but it was recognized that the changes require a change in the E116 scope which requires a major revision ballot and therefore a new SNARF.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Any equipment supplier and factory that wants the equipment to report E10 data to the factory through a GEM interface.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
E116 and E116.1 will be enhanced to report the additional desired states and state transitions using the standard GEM features like status variables, collection events and data variables. This includes reporting when the equipment is in Production or Engineering and when there is a transition between the two. Additionally, this includes reporting to identify when downtime is Scheduled & Unscheduled.

Modify or enhance E116 to utilize GEM collection events and data variables in a manner consistent with other GEM 300 connectivity standards.

Ensure that E116 is synchronized with the current/updated version of SEMI E10.

Defects and editorial mistakes found in E116 and E116.1 during this work are also expected to be included in the ballot.

Update the scope in E116 to reflect the changes. This change in E116 mandates the work to be a major revision ballot

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 05/01/2020b. 1st Draft by: 10/01/2021
c. (Optional) Informational Ballot by: d. Letter Ballot by: 12/01/2021
e. TC Chapter Approval By:04/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global I&C Technical Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Metrics
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 12/11/2020
Member Review End Date: 12/25/2020

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/23/2021
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on