SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/06/2021Revised (if Applicable):

Document Number: 6971
SNARF for: Revision to SEMI E163-0212, Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: ESD/ESC Task Force- N.A
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Electrostatic damage can be caused to semiconductor devices and to the reticles that are used to print them. Prior advice had focused on ESD avoidance, which does not always provide optimized protection for sensitive objects. The guidance in E163 was written to improve the protection of objects that can be damaged by exposure to electric field, and was based on the findings from research into reticle damage.
Since the publication of the Standard, further studies have indicated the need to strengthen the guidance given. It has now been proven experimentally that semiconductor devices can be damaged by field induction, without any ESD taking place, which was not previously thought to be the case. Reassessment of existing data from device ESD stress testing has also revealed that damage can be caused to devices in a way that does not cause them to fail, but will weaken them and probably shorten the time to failure. Thus, the original intent of the Standard – which was to apply to the handling of all field-sensitive objects, not just reticles – should be emphasized and an improved Related Information section needs to be added.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The scope is as already defined in SEMI Standard E163, which is a guide aimed at improving the electrostatic protection of field-sensitive objects being used or made within the semiconductor industry.

Further examples need to be added to the related information section to show that solid state devices can be damaged by exposure to electric field, since many ESD practitioners working in the industry currently believe this not to be the case. Some rewriting of existing line items is needed to clarify the nature of the risk posed by exposure to electric field, since it is markedly different to what is known about ESD damage.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/01/2021b. 1st Draft by: 12/01/2021
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2022
e. TC Chapter Approval By:12/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 7/29/2022
Member Review End Date: 8/12/2022

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/06/2022
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on