SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/01/2014Revised (if Applicable):

Document Number: 5701
SNARF for: Line Item Revision of SEMI M1-0114, Specifications for Polished Single Crystal Silicon Wafers, to correct references to test methods for measurement of front surface chemistry

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: International Polished Wafers Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
In looking over some other aspects of SEMI M1, it was discovered that there are two test methods cited for measurement of front surface chemistry in Table R1-1 (SEMI E45 and ISO 17331) that are not listed in either Table 1 or the referenced documents section. Also it was found that SEMI M33, which is listed in both places, was withdrawn without replacement in 2007. And it should be noted that ISO 17331 is really not the primary ISO TXRF document and should not be listed alone. Finally, in searching for SEMI E45 on the SEMI web site, it states that its status is inactive and that it is not being supported by the Technical Committee.

b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Modifications should be made in 3, Table 1, Table R1-1, and R3-8.1 of SEMI M1, as needed, to remove reference to SEMI M33 and SEMI E45 and add reference to ISO 14706 and ISO 17731. In addition, it is necessary to remove the TXRF citation from the lines for sodium and aluminum in Table R1-1 because SEMI E45 indicates that this method is not used for these elements. This is consistent with the entries in Table 1.

b: Expected result of activity
Revision to an existing Standard/Guideline

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2014b. 1st Draft by: 04/01/2014
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2014
e. TC Chapter Approval By:10/01/2014

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
All regions of International Polished Wafer and Test Methods Task Forces

b. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS04/01/2014
Recorded in TC Minutes
Attach Pictures and Files here: