SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5701
SNARF for: Line Item Revision of SEMI M1-0114, Specifications for Polished Single Crystal Silicon Wafers, to correct references to test methods for measurement of front surface chemistry

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International Polished Wafers Task Force

1. Rationale: In looking over some other aspects of SEMI M1, it was discovered that there are two test methods cited for measurement of front surface chemistry in Table R1-1 (SEMI E45 and ISO 17331) that are not listed in either Table 1 or the referenced documents section. Also it was found that SEMI M33, which is listed in both places, was withdrawn without replacement in 2007. And it should be noted that ISO 17331 is really not the primary ISO TXRF document and should not be listed alone. Finally, in searching for SEMI E45 on the SEMI web site, it states that its status is inactive and that it is not being supported by the Technical Committee.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Modifications should be made in 3, Table 1, Table R1-1, and R3-8.1 of SEMI M1, as needed, to remove reference to SEMI M33 and SEMI E45 and add reference to ISO 14706 and ISO 17731. In addition, it is necessary to remove the TXRF citation from the lines for sodium and aluminum in Table R1-1 because SEMI E45 indicates that this method is not used for these elements. This is consistent with the entries in Table 1.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/01/2014b. 1st Draft by: 04/01/2014
c. Preballot by: d. Technical Ballot by: 07/01/2014
e. Committee Approval By:10/01/2014

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on April 1, 2014