SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 09/07/2012Revised (if Applicable):

Document Number: 5488
SNARF for: New Standard: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: International Process Module Physical Interface TF (IPPI-TF)
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

- Standardization of transport module/process module interface is beneficial for both process equipment supplier and users as it can shorten the period between chamber development stage and volume production tool qualification stage.

- The standard to be developed should ensure minimum necessary level of physical connectivity to the transport module part of a process tool for any process module without any significant design change when the process module is incorporated into the process tool.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

The proposed document will be a Subordinate Standard to E21, and is expected to provide 450 mm compatible values for all the parameters defined in SEMI E21.

The proposed document covers tool/chamber physical interface and interoperability related specifications for the 450mm single wafer vacuum process tools.
Wafer transport plane specifications
Transport maximum reach
Wafer + arm Clearance specifications at the interface plane
Connectivity specifications at the interface plane


b: Expected result of activity
New Standard

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/01/2011b. 1st Draft by: 09/30/2012
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/08/2012
e. TC Chapter Approval By:12/07/2012

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
Global PIC Committees

b. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 14.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material



NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 15 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
None.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9.. SNARF Approval Dates:
TC Chapter or GCS09/07/2012
Recorded in TC Minutes
Attach Pictures and Files here: