SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5488
SNARF for: New Standard: Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International Process Module Physical Interface TF (IPPI-TF)

1. Rationale:
- Standardization of transport module/process module interface is beneficial for both process equipment supplier and users as it can shorten the period between chamber development stage and volume production tool qualification stage.

- The standard to be developed should ensure minimum necessary level of physical connectivity to the transport module part of a process tool for any process module without any significant design change when the process module is incorporated into the process tool.

Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

The proposed document will be a Subordinate Standard to E21, and is expected to provide 450 mm compatible values for all the parameters defined in SEMI E21.

The proposed document covers tool/chamber physical interface and interoperability related specifications for the 450mm single wafer vacuum process tools.
Wafer transport plane specifications
Transport maximum reach
Wafer + arm Clearance specifications at the interface plane
Connectivity specifications at the interface plane

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/01/2011b. 1st Draft by: 09/30/2012
c. Preballot by: d. Technical Ballot by: 10/08/2012
e. Committee Approval By:12/07/2012

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on September 7, 2012