SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5485
SNARF for: New Standard: Guide for Incoming/Outgoing Quality Control and Testing Flow for 3DS-IC Products

Originating Global Technical Committee: 3DS-IC
Originating Technical Committee Region: Taiwan
Task Force in which work is to be carried out: 3DS IC Testing Task Force

1. Rationale: To ensure consistent yield control of 3DS-IC products, common criteria for incoming quality control (IQC) and outgoing quality control (OQC) of OSATs (outsourced sub-assembly and test providers) are needed. The generic testing flows for different 3DS-IC products to also be defined in this document will expedite the progress of 3DS-IC testing.

Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
This guide will define the criteria of incoming quality control (IQC) and outgoing quality control (OQC) of OSATs, such as appearance, TSV void percentage by X-ray inspection, etc., to clarify the manufacturer’s responsibilities and to improve product yield. This guide will also define the generic testing flows for different 3DS-IC products, such as chip on chip (CoC), chip on substrate (CoS), stacked chip on substrate (CoS), wafer on wafer (WoW), etc., to help accelerate the progress of 3DS-IC testing.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 09/11/2012b. 1st Draft by: 03/15/2013
c. Preballot by: d. Technical Ballot by: 04/01/2013
e. Committee Approval By:06/01/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on September 11, 2012