SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/19/2014Revised (if Applicable):

Document Number: 5761
SNARF for: New Standard: EHS Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Energetic Materials EHS Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Based on international device manufacturing accident and incident experience over the last four (4) years (2011-2014) with new energetic compounds being used to support advanced semiconductor process, a total of 70+ incidents have been documented, causing loss of life, significant facility damage and production business interruption. Based on this experience, a majority of leading semiconductor device manufacturers (GLOBALFOUNDRIES, IBM, Intel, Samsung, SK Hynix, TI, tsmc) along with CNSE have determined the need to for a comprehensive international best known methods safety guideline for safe use, handling, processing and disposal of reactive hazardous materials which have or may exhibit energetic properties.

This SEMI Standards activity is intended to:
- Develop EHS guidance for the entire supply chain to assist in timely and accurate characterization of energetic processing materials.
- Propose design considerations for equipment, delivery system, pump and abatement manufacturers.
- Identify handling, use and disposal best practices, as well as, operation, maintenance and emergency response criteria for end users.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Equipment supplier building MOCVD and ALD R&D Manufacturing Equipment, Material Supplier providing bulk and transfill energetic delivery systems for R&D and Manufacturing applications and Material Suppliers providing energetic chemistry to End Users

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This environmental, safety and health (ESH) guideline is intended to provide a supplemental set of ESH criteria for the procurement, storage, handling, and use of energetic materials in existing and new semiconductor R&D and Manufacturing processes from all phases of use: chemical supply to abatement.

This guideline will cover the handling, shipping and disposal of waste energetic materials and process byproducts as well as equipment and components containing residual energetic materials and process byproducts.

It will also set minimum characterization data to be provided before an energetic material is introduced into research and development, pilot line and high volume semiconductor manufacturing processes as well as define ESH design criteria for capital equipment suppliers designing chemical supply process and post process equipment for semiconductor processes using energetic materials.

Energetic materials that are within the proposed scope of this document are:

- Substances used in and generated from semiconductor R&D and Manufacturing Processes which exhibit one or more of the following properties

> Is classified as a pyrophoric substance such as organic precursors (Diethyl Zinc, Tertiarybutyl arsine, Tertiarybutyl phosphine, Trimethyl Aluminum, Trimethyl Gallium and Trimethyl Indium)

> Is classified as an unstable reactive (greater than or equal to 2) and/or water reactive material (greater than or equal to 2) by the National Fire Protection Association Standard NFPA 704 “Standard System for the Identification of the Hazards of Materials for Emergency Response”

- By-products anticipated having either unstable, water reactive and/or pyrophoric properties that are generated from semiconductor R&D and Manufacturing processes.

Note: The scope of this document is intended to complement and support other industry safety guidelines (e.g., SEMI S18). The intent is to prevent overlap with other SEMI safety standards.

The proposed outline of this Energetics ESH Guideline is as follows:

Purpose
Scope
Limitations
References
Terminology
Safety Philosophy
General Provisions
Best Known Method Guidelines
- Integrated Hazard Analysis
- Material Supplier Requirements Characterization
- End User - Facility Receiving, Inspection, Storage, Transport and Emergency Response Requirements
- Bulk (External) Delivery System(s) - Remote – Supplier
- Bulk (Remote) Delivery System(s) – End User
- Equipment Supplier Design Considerations – On Tool Ampoule Delivery
- Equipment Supplier Design Considerations – Process Chamber
- Equipment Supplier Design Considerations – Post Process Chamber through Vacuum Pump/Abatement System
- End User Design Considerations – Post Process Chamber through Vacuum Pump/Abatement System
Appendices

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 08/01/2014b. 1st Draft by: 10/01/2014
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2015
e. TC Chapter Approval By:03/01/2015

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global EHS Committee

Intercommittee Ballots will be issued to: Gases, Liquid Chemicals, Facilities

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SEMI Staff Note: This document will be based on the SEMATECH BKM document.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/10/2014
Recorded in TC Minutes07/10/2014

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 07/12/2018
Extension Expires on07/12/2019