SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/30/2021Revised (if Applicable):

Document Number: 6746
SNARF for: New Standard: Guide for Critical Parameters of Gas Sensors

Originating Global Technical Committee: MEMS / NEMS
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: MEMS and Miniaturized Gas Sensing Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
As with any emerging technology, miniaturized gas and environmental sensor makers today do not conform to specific or well understood standards, whether it is with regards to parameter definitions, testing methods, reliability requirements, packaging, pin configurations, communication interfaces, etc., to name a few. Our WG believes that gas sensing technology and the relevant markets are at the right point in their evolution for introducing a set of well-defined technical and performance standards for gas sensors. We envision that not only will this encourage market leaders to focus on innovation, but also contribute to increased adoption in application areas where customization from the ground-up can often be a barrier to commercial success. For example, it is currently very difficult for customers today to compare different miniaturized gas sensor devices, or to use multiple devices within a single platform to sense different environmental gases.

The goal of the standards group is to deliver a document that provides guidelines for performance, interface, and testing related parameters to be reported on a typical gas sensor datasheet.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Gas Sensing

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The proposed document will cover the following sub-topics:
· The guide would be applicable to all gas sensors, irrespective of the gas they are meant to sense.
· The guide will define the minimum set of parameters, along with their definitions, that all gas sensor vendors are recommended to adhere to.
· Where possible, this document will provide guidelines for how a parameter is to be tested and measured.
· This guide will recommend the range of values (min, max) for each identified parameter, along with a ‘typical’ value where appropriate.
The document will propose a standard format for gas sensor digital data output.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/30/2021b. 1st Draft by: 04/01/2021
c. (Optional) Informational Ballot by: d. Letter Ballot by: 05/18/2021
e. TC Chapter Approval By:08/01/2021

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Gases, Facilities

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities, Gases
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Per Shannon suggestion, updated title from "Guide for Gas Sensors' Critical Parameters" to "Gude for Critical Parameters of Gas Sensors"

Updated SNARF to remove "MEMS" in front of gas sensors/devices/etc. toto ensure that the scope of the standard and its descriptions are not limited to MEMS based sensors, but will be considered applicable to all the different miniaturised gas sensing technologies incl MEMS, optical, electo-chemical, CNT based etc…. This will maximise the relevance -- July 16, 2021, LNN

Updated Word and PDF files to remove "MEMS" from the file name -- July 30, 2021, LNN

Version "A" Passed with editorial changes, NA Fall Meeting September 2021. 
Passed A&R Cycle 11-2021. 
Published as: SEMI MS14
Publishing Cycle: 0422


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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 03/11/2021
Member Review End Date: 03/25/2021

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/30/2021
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
SNARF_Gas Sensors (new).docSNARF_Gas Sensors (new).docSNARF_Gas Sensors (new).pdfSNARF_Gas Sensors (new).pdf