SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 04/01/2004

Revised (if Applicable):

Name of Task Force (TF): Precursor Specifications Task Force

Global Technical Committee: Liquid Chemicals

Originating Technical Committee Region: Europe

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1. Charter: (State the objective of the proposed TF.)
To establish common standards for precursors specifications
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2. Scope: (Define the specific activities that the TF will conduct.)
- Collate and Monitor pubic domain specifications
- Draft and ballot new standards
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 04/01/2004
Task Force approved by Committee/GCS on: 04/01/2004

5. Comments
None.