TFOF for Gas Box Components Joint Task Force
SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Revised (if Applicable):
Name of Task Force (TF):
Gas Box Components Joint Task Force
Global Technical Committee:
Originating Technical Committee Region:
(State the objective of the proposed TF.)
The task force covers development of standard documents that address various components in one document and beyond the scope of a task force which covers standardization of specific component types, such as MFCs, valves, filters, etc. This objective is carried out through supporting such document developments in other regions and/or developing such documents by itself.
(Define the specific activities that the TF will conduct.)
The task force develops and/or supports developments of standard documents that cover (within a single document) various component types used in gas box of semiconductor manufacturing equipment.
The task force does not work on documents which cover a specific component type. Those documents are covered by a task force for the component type.
3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA Modular Components Task Force
4. Formation Date:
(TF formed on)
Task Force formed on:
Task Force approved by Committee/GCS on: