TFOF for Gas Box Components Joint Task Force
SEMI International Standards
Date Prepared:
Revised (if Applicable): 01/25/2010

Name of Task Force (TF): Gas Box Components Joint Task Force

Global Technical Committee: Facilities
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
The task force covers development of standard documents that address various components in one document and beyond the scope of a task force which covers standardization of specific component types, such as MFCs, valves, filters, etc. This objective is carried out through supporting such document developments in other regions and/or developing such documents by itself.
2. Scope: (Define the specific activities that the TF will conduct.)
The task force develops and/or supports developments of standard documents that cover (within a single document) various component types used in gas box of semiconductor manufacturing equipment.

The task force does not work on documents which cover a specific component type. Those documents are covered by a task force for the component type.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA Modular Components Task Force
4. Formation Date:(TF formed on)

Task Force formed on: 07/02/1997
Task Force approved by Committee/GCS on: