SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/03/2020Revised (if Applicable):

Document Number: 6720
SNARF for: Revision to SEMI E134-0414: Specification for Data Collection Management

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Diagnostic Data Acquisition Task Force NA
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Note that most of the items listed were previously approved as part of SNARF 6553. It has been revised because certain voters claim that the proposed changes in ballot 6553C were out of scope. SEMI Regulations prevent revising the existing SNARF with new scope items. This revision also intends to make it clear that every proposed change cannot be predicted, yet still convey the intended changes and magnitude of the changes. This activity started in 2019.

During the implementation and adoption of EDA freeze versions 1 and 2, many lessons have been learned. The task force wishes to enhance EDA and resolve various issues that have emerged.

1) Higher Data Collection Frequency
Using the current trace data collection techniques, where collected data samples are collected and reported one at a time, the data collection frequency is limited to about 40 Hz. For some data collection applications, much higher frequencies are needed. This can only be accomplished by allowing data to be cached at a low level, and then reported in batches.

2) Move items from E134.1
A few items that are currently in E134.1 should have been in E134. For example, the details on specifying SEMI object items for data collection. These must be moved into E134.

3) Changes related the protocol change
As protocol changes are under development, additional changes to E134 itself might be necessary.

Other changes are sure to be requested as these changes are designed, as E132 and E125 are concurrently modified and as more members contribute various ways to improve EDA.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Major effect on anyone implementing or adopting the EDA standards and choosing to upgrade.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Major and technical changes will be made to E134. This proposal suggests updating E134 as follows:

1) Clarify the meaning of a client, consumer and equipment server.

2) Remove technology specific references and replace them with abstract references to the subordinate technology-specific implementation.

3) Add a new type of trace request and report that allows for higher speed data collection by caching the data at a low level and reporting the data as an array. We are calling this a “cached data sample” request and report. While similar to trace data collection, the reporting of higher frequency data collection is significantly more efficient.

4) Copy and update items from E134.1 into E134 which really belonged in E134 in the first place. For example, the explanation about the syntax for SEMI objects items in a data collection plan related to “any instance” and “specific instance” of state machine events.

5) Make any changes as necessary as related to the protocol changes that are under development in other ballots.

6) Simplify the data collection of SEMIObj attributes to be more similar to GEM (SEMI E30) and SEMI E39.

7) Define Notification Message and Operational Message concepts and clarify when they will be sent and how errors are handled.
8) Integrate Client Session and Consumer Session concepts
9) Removing implementation specific details in the primary standard (for example SOAP/XML)
10) Make error handling consistent.
11) Any other changes to keep E134 consistent and compatible with changes proposed in E132 and E125 ballots.

As a major revision ballot, this ballot may include other changes to address features or defects raised by task force members during the review and development of the proposed changes listed above and that are desired to be part of EDA freeze 3. Significant changes in scope still require a SNARF revision in compliance with SEMI regulations.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2019b. 1st Draft by: 12/01/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2021
e. TC Chapter Approval By:04/01/2021

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global I&C Technical Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s).

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
Letter of Intent received

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is previously known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
NON-ASSERTION AGREEMENT between SEMI and Asyst Technologies has been signed with for US Patents #11/340101, #11/107508, #09/899833, and 09/496009, in 2008.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 12/11/20
Member Review End Date: 12/25/20

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS01/29/2021
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on