SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
04/02/2013
Revised (if Applicable):
Name of Task Force (TF):
Patterned Sapphire Substrate (PSS) TF
Global Technical Committee:
HB-LED
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
Patterned Sapphire Substrates [PSS] are critical in maximizing efficacy of HB-LED device light output. PSS structures are created by etching photolithographic-defined features. PSS feature post-etch geometries can be related to preceding process steps.
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2. Scope:
(Define the specific activities that the TF will conduct.)
This TF activity will focus on developing post-etch PSS structure geometry definitions and metrology useful for process development, monitoring and yield analyses.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
TBD
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4. Formation Date:
(TF formed on)
Task Force formed on:
07/10/2013
Task Force approved by Committee/GCS on:
07/11/2013
5. Comments
None.
