SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 05/26/2020Revised (if Applicable):

Document Number: 6651
SNARF for: Line Item Revision to SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Re: Addition of Pressure section)

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: S2 Pressure Guidelines Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEMI S2 is not up-to-date with current regulations/requirement of Pressure system. There is nowhere in SEMI S2 this is addressed in the main document. Current main industry (South Korea) is pushing pressure requirements a lot.

Pressure is now not addressed in the SEMI S2. By adding this including RI and/or Appendix the taskforce tries to make the S2 a guideline for equipment manufacturers where they make a safe design but also aware of the requirements that are needed in certain countries.

If SEMI is well used and country requirement of manufacturers are in place it even might become acceptable for certain countries without additional inspections/approval for pressure systems,



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Companies that make equipment with pressure systems in it. Companies using pressures > 1 MPa in the equipment

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Section in the main body covering essential safety aspects of pressure systems using suitable materials and ensure that maximum pressures are guarded.

Pressure system has beside safety aspects requirements like:
- Local approval needed for certain pressure parts
- Often > 1MPa extra proof requirements (like material certificates, welding inspections, witnessing (government/notified body))

An RI provides more information about standards, regional aspects and risk assessment aspects for pressure

In the second phase additional Appendices/RI can be added for country specific requirements


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 05/01/2020b. 1st Draft by: 07/01/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/01/2020
e. TC Chapter Approval By:11/01/2020

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Facilities

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/26/2020
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Attach Pictures and Files here: