SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 10/06/2009Revised (if Applicable):

Document Number: 4819
SNARF for: Standard Test Method for Electroosmotic Mobility in Microfluidic Systems

Originating Global Technical Committee: MEMS / NEMS
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: MEMS Microfluidics
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

Microfluidic MEMS systems require predictable fluid flow behavior in order to achieve proper device operation. Electroosmotic fluid flow behavior is governed by the surface charge/chemistry of the microchannel material and its interaction with the fluid medium and any other materials dispersed in the fluid. A key parameter that is used to describe the flow is the electroosmotic mobility, which links the applied voltage to the fluid flow rate in the system. A standard test method to determine the electroosmotic mobility of fluids conveyed in a micro-scaled channel will address the requirements for maintaining desired fluidic operation. Fluids may contain ions, particulates, and colloidal suspensions of organic and inorganic materials.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

This standard will describe a procedure for carrying out a measurement, collecting the data, and performing data analysis. Specifically, the standard will describe the design of a test structure, the experimental setup, the experimental procedure, and the calculation of the electroosmotic mobility parameter from the resulting data. It is intended to characterize the electroosmotic mobility of materials and changes that processes used in the fabrication and operation of a device have on it.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/01/2009b. 1st Draft by: 11/01/2010
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2011
e. TC Chapter Approval By:11/01/2011

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/02/2009
Recorded in TC Minutes11/02/2009

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on