SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/30/2020Revised (if Applicable): 07/16/2020

Document Number: 6646
SNARF for: New Standard: Guide for Reporting Density and Porosity of the Chemical Mechanical Planarization (CMP) Pads used in Semiconductor Manufacturing

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Chemical Mechanical Planarization Consumables (CMP-C) Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
CMP polishing pad manufacturers rely on historical legacy metrology to measure polishing pad density and porosity, which are not taken into account contribution of pad porous structure and, thus, is not capable of accurately correlating pad properties to CMP performance for current needs in semiconductor manufacturing. A guide needs to be instituted to address these industry gaps.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:
IDMs; manufacturers of CMP pads

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
• To determine and implement more capable metrologies to measure CMP pad, including sub-pad, density and porosity for any type of CMP pads;
• To take into account porosity of CMP pads/subpads in measuring pad/subpad density
• To provide guidance for comprehensive and consistent reporting of density and porosity parameters and test conditions.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/30/2020b. 1st Draft by: 07/23/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 09/10/2020
e. TC Chapter Approval By:11/01/2020

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
None

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
None

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Due to the postponement of NA Liquid Chemicals Spring Committee meeting, this SNARF was distributed for two week TC Member review and authorized via GCS.

Original SNARF prepared 03/30/2020, went out for two-week review 04/10/2020 - 04/24/2020. SNARF was approved via GCS on 05/07/2020.

SNARF was revised to reflect change in title and scope. Two-week TC Member Review for revision to SNARF took place at the below dates.

Passed with editorial changes, NA Winter Meeting Feb 2021.
Passed A&R Cycle 03-2021.

Published as: SEMI C102

(Note: Ballot did not have correct revised title, so this standard will be reballoted as a Line Item to fix title --LNN)

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 08/02/2020
Member Review End Date: 08/16/2020

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/08/2020
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
Revision_SNARF 6646_pad Density and Porosity_Aug2020.docRevision_SNARF 6646_pad Density and Porosity_Aug2020.docRevision_SNARF 6646_pad Density and Porosity_Aug2020.pdfRevision_SNARF 6646_pad Density and Porosity_Aug2020.pdf