SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/10/2018Revised (if Applicable):

Document Number: 6500
SNARF for: Line item revision to SEMI M58-1109 (Reapproved 0614) Test Method for Evaluating DMA Based Particle Deposition Systems and Processes

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: International Automated Advanced Surface Inspection Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

SEMI M58-1109 (reapproved 0614) is up for 5 year review by the IAASI Task Force.



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

The IAASI TF has reviewed M58 and recommends reapproval without technical or editorial changes to the main body of the Standard. However, during review, it was found that the only known certified reference material (CRM) required by the Test Method cited in footnote 2 to § 8.1.1.1, namely NIST SRM 1963, was no longer available. Furthermore, 1963’s successor, NIST SRM 1963a, in industry use after January 2010, marginally exceeded one of M58’s requirements for the CRM, and its time-limited certification had expired in May 2017.

The TF has communicated with NIST and learned that remaining stock of SRM 1963a, and its sister SRM 1964 (which meets M58 requirements per § 8.1.1.2) have been revalidated and are expected to become available in Dec 2018. NIST also plans to develop a better version of 1963a over the next 12-18 months, which is expected to meet M58 requirements in full.

The TF will proceed as follows:

· Wait until 1963a and 1964 are again available for purchase from NIST.

· Revise the text of footnote 2 to § 8.1.1.1 and add footnote 3 to § 8.1.1.2 as shown below.

· Go to ballot in the next available cycle following the 2019 NA Spring Stds meetings, with adjudication to follow at SEMICON West 2019.


Footnote 1 proposed text:

Current: At the present time, NIST SRM 1963 meets these requirements.

Proposed: NIST SRM 1963a, recently revalidated, has a FWHM that is 5.5% of the certified modal diameter, slightly exceeding these requirements. Nevertheless, 1963a is currently the only known, available CRM for this Test Method. As of <date> the NIST has informed the Task Force that new SRM is being developed with a target of meeting these requirements in the next 18-24 months.


Footnote 2 proposed text:

Current: [none]

Proposed: NIST SRM 1964, also recently revalidated, meets these requirements.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/10/2018b. 1st Draft by: 03/01/2019
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/01/2019
e. TC Chapter Approval By:03/01/2019

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/13/2018
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on