SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 07/11/2018

Revised (if Applicable):

Name of Task Force (TF): Critical Chamber Components (CCC) Test Methods Task Force

Global Technical Committee: Metrics

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)

- To ensure the critical chamber components (CCC) are suitable for being used for the type of production equipment and process application they are designed to be used in semiconductor device manufacturing
- To establish Test methods for ensuring that each critical non-process performance related characteristic of CCC is measured, recorded and reported in a uniform manner for better quality assurance and traceability in the event of process failure/defects increase.
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2. Scope: (Define the specific activities that the TF will conduct.)

- To develop Test Methods for measuring different type of contaminants (e.g., metals, particles, organics) on the wetted area of critical chamber components (CCC).
- To develop Test Methods for measuring surface morphology of CCC
- To develop or expand existing Standards to address Test Methods for refurbished CCC parts.
- May expand other characteristics of CCC as far as such characteristics are in common for across different process equipment types and/or models
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
None
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4. Formation Date:(TF formed on)

Task Force formed on: 07/11/2018
Task Force approved by Committee/GCS on: 07/11/2018

5. Comments
None.