SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
04/19/2012
Revised (if Applicable):
Name of Task Force (TF):
PV Diffusion Furnace Test Methods TF
Global Technical Committee:
Photovoltaic
Originating Technical Committee Region:
China
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1. Charter:
(State the objective of the proposed TF.)
Identify standardization needs and priorities and develop test methods related to diffusion furnaces to help evaluate the performance of heater tubes.
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2. Scope:
(Define the specific activities that the TF will conduct.)
1) In-line monitoring of flat temperature zone in horizontal diffusion furnaces;
2) Plasma enhanced chemical vapor deposition equipment.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Int’l PV Analytical Test Methods TF
PV Silicon Materials TF
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4. Formation Date:
(TF formed on)
Task Force formed on:
05/11/2012
Task Force approved by Committee/GCS on:
05/11/2012
5. Comments
None.