SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/28/2015Revised (if Applicable):

Document Number: 5946
SNARF for: New Standard: Test Method for Grain Boundary of Single Crystal Sapphire by Optical Homogeneity Technique (OHT)

Originating Global Technical Committee: HB-LED
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: Single Crystal Sapphire Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Several inspection techniques are used in the industry to inspect and specify the quality of Sapphire used for HB-LED production. However, most companies recognize and use Optical Homogeneity Technique (OHT) to inspect the grain boundary defects of sapphire crystal for HB-LED wafers. Furthermore, this technique is quick, low cost and provides observations of crystal quality that are relevant to the production yield of HB-LED wafers.
However, there is no formal procedure for this inspection method, resulting in differing inspection results. This leads to disagreement between parties as to the quality of sapphire and inefficiencies in the procurement and delivery of sapphire products. Establishing clear procedures for the inspection of sapphire and defining standardized quality grades will greatly improve efficiencies in the sapphire supply chain.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Crystal growth, rod fabrication, wafer fabrication

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Inspection procedure for observing grain boundaries in single crystal sapphire.
2. Definition of terms used in the measurement procedure and for describing grain boundary defects.


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 09/21/2015b. 1st Draft by: 03/21/2016
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/20/2016
e. TC Chapter Approval By:11/20/2016

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
NA HB-LED Committee Chapter

b. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 08/10/2015 .
Member Review End Date: 08/21/2015.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/18/2015
Recorded in TC Minutes09/30/2015

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 10/24/2018
Extension Expires on09/18/2019


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