SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
04/26/2019
Revised (if Applicable):
Name of Task Force (TF):
P47 Revision Task Force
Global Technical Committee:
Micropatterning
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
Review SEMI P47-0307: Test method for Evaluation of Line-Edge Roughness and Linewidth Roughness
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2. Scope:
(Define the specific activities that the TF will conduct.)
Limited to SEMI P47
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
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4. Formation Date:
(TF formed on)
Task Force formed on:
04/26/2019
Task Force approved by Committee/GCS on:
04/26/2019
5. Comments
None.
