SEMI International Standards
Date Prepared: 04/04/2011Revised (if Applicable): 07/12/2016

Name of Task Force (TF): Ultra Pure Water Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)
The goal of the task force is to develop test methods and guides used for design and operation of facility and other systems that affect high purity water quality. The Task Force will support documents used in electronic industry.
2. Scope: (Define the specific activities that the TF will conduct.)
The scope of the task force is to develop new and update the existing specifications for high purity water systems and components to the level of the water quality requirements that would support the needs of the electronic industry. Although the focus is on advanced Semiconductor manufacturing processes (size of the node of 65nm and smaller), the task force will support other segments of the electronic industry. The examples of the documents supported by this task force are F63, C79, F61, F75, etc.
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
The Task Force will include representatives from different filtration and analytical companies. The intent is to effectively engage UPW ITRS members in the development of the specification that will address both regional and cross-industry representation needs.
4. Formation Date:(TF formed on)

Task Force formed on: 04/12/2011
Task Force approved by Committee/GCS on: 04/12/2011

TF name, charter, and scope - revised 07/2016 during SEMICON West..