SEMI International Standards
Task Force Organization Form (TFOF)

Task Force Name: Ultra Pure Water Filtration Efficiency Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: North America

1. Charter:

The goal of the task force is to develop a new method of quantifying UPW (Ultra-pure water) final filter performance for the filters with a pore size of 5-15 nm and less.

2. Scope:
The scope of the task force is limited to the development of a new standardized methodology for the measurement of the efficiency of the UPW filter for removal of the particles of the 5-15nm size. The task force will review existing available techniques and methods of the particle measurement at the target size. The most effective method/s will be selected for feasibility/applicability experiments. The experimental work will involve several filtration products. Based on the success of the experimental work, the testing procedure will be described in the document submitted for ballot as a reference method for approval/publication.

3. Formal linkages with Task Forces in other Regions:
The Task Force will include representatives from different filtration and analytical companies. The intent is to effectively engage UPW ITRS members in the development of the specification that will address both regional and cross-industry representation needs.

4. Approval:
Task Force formed on: 04/12/2011