SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
11/01/2022
Revised (if Applicable):
Name of Task Force (TF):
Equipment Data Publication (EDP) Task Force
Global Technical Committee:
Information & Control
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
To develop, maintain and improve standards related to defining what data to be required from equipment and subcomponents, outlining content attributes such as name, format, and data quality
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2. Scope:
(Define the specific activities that the TF will conduct.)
To manage standards on data content and availability from equipment and subcomponents, with input from device makers, equipment suppliers, and software vendors.
Topics covered by the Task Force will include (but not limited to):
- Data definition and classification of equipment and subcomponent data. For example, process data, health data, along with data content attributes such as name, value, unit, data quality etc.,
- Definition of minimum set of equipment and subcomponent data that can be acquired, e.g. early excursion detection/prevention and other offline analysis. This includes format of the data provided and minimum expected data response (how fast the data can be collected)
- Identifying existing standards related to how the equipment and subcomponent data content can be acquired (e.g. SECS/GEM, EDA/ Interface A, Sensor Bus, etc.)
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Taiwan Equipment Edge Data Governance (EEDG) Task Force – Information & Control
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4. Formation Date:
(TF formed on)
Task Force formed on:
11/09/2022
Task Force approved by Committee/GCS on:
11/09/2022
5. Comments
None.
