SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 03/29/2022
Revised (if Applicable):

Name of Task Force (TF): Statistical Methods Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: North America


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1. Charter: (State the objective of the proposed TF.)
Maintain and update existing SEMI standards documents SEMI C1, C10, and C64 and propose new standards that are related to statistical analysis and control of reported parameters for Process Chemicals and Gases.
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2. Scope: (Define the specific activities that the TF will conduct.)
Revise existing standards to support the continued development of standardized statistical methodology for determining whether data is in control. The following areas are to be addressed:

- How to handle method detection limit (MDL) censored data
- How to handle sample size for each measured property
- How to set risk levels in statistical procedures
- How to deal with non-normality
- How to determine and handle outliers
- How to estimate control limits
- How to manage control limits
- Frequency with which control limits will be determined
- Requirements for when to ship material based on the CoA results for that material

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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Gases GTC
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4. Formation Date:(TF formed on)

Task Force formed on: 03/29/2022
Task Force approved by Committee/GCS on: 03/29/2022

5. Comments
None.