SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 09/22/2019Revised (if Applicable):

Document Number: 6600
SNARF for: New Standard: Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Water Management Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

Importance of water conservation in semiconductor industry is growing, going beyond environmental and financial benefits. Growing semiconductor mega-sites often outpace the rate of development of local infrastructure, posing risks constraining ability of the site to grow.
Implementation of water conservation measures during construction projects requires standardization of the capabilities. Semiconductor industry best practices in water reuse focus on facility systems (as documented in SEMI F98 guide). However, water reuse within manufacturing tools has not been standardized, making it difficult to enable water conservation decisions throughout supplied chain, providing options for end users.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Semiconductor tool OEM, tool install, facility management, etc

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The scope of this effort is to collect industry best practices information on water reuse, including tool drain segregation and treatment, and document it in this guide.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/05/2019b. 1st Draft by: 07/01/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/01/2020
e. TC Chapter Approval By:11/01/2020

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
none

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
The plan is to concurrently update SEMI F98 to ensure alignment between the two water reuse documents. Separate SNARF is submitted fpr F98 revision.

Title changed from:
Guide for Semiconductor Tool Water Reuse
to:
Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse
<for Cycle 7-2020>

6600, Passed with technical changes, NA Winter Meeting Feb 2021.
Passed A&R Cycle 03-2021.

Ratificaltion Ballot issued in Cycle 3-31.

Passed A&R Cycle 07-2021
Published as: SEMI F116


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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 10/17/2019.
Member Review End Date: 10/31/2019.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/05/2019
Recorded in TC Minutes11/05/2019

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on