SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 09/18/2015

Revised (if Applicable):

Name of Task Force (TF): Live Gas Flow Rate Task Force

Global Technical Committee: Gases

Originating Technical Committee Region: Japan

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1. Charter: (State the objective of the proposed TF.)
To develop standard of test method(s) for live gas flow rate of mass flow controllers.
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2. Scope: (Define the specific activities that the TF will conduct.)
1) TF will configure methods to measure live gas flow rate of mass flow controllers
2) To standardize of test methods.
3) To make new standard or refine existing standards such as F77-1104.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 09/18/2015
Task Force approved by Committee/GCS on: 09/18/2015

5. Comments
None.