SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5496
SNARF for: Line Item Revision to SEMI C80-0113, Guide for Tetrakis(Dimethylamino) Silane (TDMAS)

Originating Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: Precursor Specifications Task Force

1. Rationale: Change Aluminum specification from 100 ppb to 5 ppb to reflect today’s industry accepted contamination level.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The task force will address the identification and quantification of nano-particulate, molecular and elemental impurities/contaminants in precursors employed to create thin films of: Low K, High K, diffusion barriers and metallization. The aim is to provide a common standard around which vendors can build their proprietary position. The task force will commence by collating and monitoring SEMI and public domain specifications, then prioritize molecules for specification drafting.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/10/2012b. 1st Draft by: 01/03/2013
c. Preballot by: d. Technical Ballot by: 01/05/2013
e. Committee Approval By:10/01/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 10, 2012