SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/01/2012Revised (if Applicable): 07/09/2013

Document Number: 5503
SNARF for: Line Item Revision to SEMI M52-0912 Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 11 nm Technology Generations

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: International Automated Advance Surface Inspection Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)


-Add SEMI M80 in 3.1 SEMI Standards and Table 1-1.7 Type of Cassettes as references.


Table 1.13 of the M52 rev. 102012 states:”less than 1% of adders are allowed to contain metal”
Requirement cannot be proved by any other way than making 1,500 – 15,000 wafer cycles (for 300mm size), collecting and then reviewing all 100 – 1,000 adders to be nonmetallic. (Higher scan number is for a statistical validity).
Such procedure is not possible (or not practical), and the requirement cannot be used in a SEMI Standards Document therefore.
It should be replaced by a statement: “out of 5 reviewed adders none is allowed to contain metal”. New requirement can be proved by collecting at least 5 adders, and then reviewing a set of 5 adders to be nonmetallic.



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

Add SEMI M80 (SEMI M80 — MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 mm WAFERS) after M59 in “3 Referenced Standards and Documents.”

1. Replace in Table 1, Line 1.13 of the M52 - 102012 ”less than 1% of adders are allowed to contain metal” with:
“out of 5 reviewed adders none is allowed to contain metal”.
2. Comment in Table 1, Line 1.13 of the M52 – 102012 add: If < 5 adders are found after 500 cycles, then continue cycling until at least 5 adders are found.


b: Expected result of activity
Revision to an existing Standard/Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2012b. 1st Draft by: 01/01/2013
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2013
e. TC Chapter Approval By:10/01/2013

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)


b. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 14.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material



NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 15 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
None.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9.. SNARF Approval Dates:
TC Chapter or GCS07/09/2013
Recorded in TC Minutes
Attach Pictures and Files here: