SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5503
SNARF for: Line Item Revision to SEMI M52-0912 Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130 nm to 11 nm Technology Generations


Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International Automated Advance Surface Inspection Task Force


1. Rationale:

-Add SEMI M80 in 3.1 SEMI Standards and Table 1-1.7 Type of Cassettes as references.


Table 1.13 of the M52 rev. 102012 states:”less than 1% of adders are allowed to contain metal”
Requirement cannot be proved by any other way than making 1,500 – 15,000 wafer cycles (for 300mm size), collecting and then reviewing all 100 – 1,000 adders to be nonmetallic. (Higher scan number is for a statistical validity).
Such procedure is not possible (or not practical), and the requirement cannot be used in a SEMI Standards Document therefore.
It should be replaced by a statement: “out of 5 reviewed adders none is allowed to contain metal”. New requirement can be proved by collecting at least 5 adders, and then reviewing a set of 5 adders to be nonmetallic.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

Add SEMI M80 (SEMI M80 — MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 450 mm WAFERS) after M59 in “3 Referenced Standards and Documents.”

1. Replace in Table 1, Line 1.13 of the M52 - 102012 ”less than 1% of adders are allowed to contain metal” with:
“out of 5 reviewed adders none is allowed to contain metal”.
2. Comment in Table 1, Line 1.13 of the M52 – 102012 add: If < 5 adders are found after 500 cycles, then continue cycling until at least 5 adders are found.


b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 11/01/2012b. 1st Draft by: 01/01/2013
c. Preballot by: d. Technical Ballot by: 07/01/2013
e. Committee Approval By:10/01/2013




Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 9, 2013