SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
03/29/2022
Revised (if Applicable):
Name of Task Force (TF):
SEMI E72 Revision Task Force
Global Technical Committee:
Physical Interfaces & Carriers
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
To update E72 to allow choosing alternative set of standardized dimensions to accommodate tall and lean 3D layout of production equipment in recently built 300 mm Fabs, in addition to the dimensioning criteria to which any production equipment is required to be configurable in current E72.
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2. Scope:
(Define the specific activities that the TF will conduct.)
· To conduct a survey to get prevalent range of value for each dimension. (average, mean, sigma, etc.)
· To separate sections belonging to Guide Subtype content of E72 from Specification parts
· To come up with alternative set of standardized dimensions that would accommodate tall 3D layout, or other out of range Fab situation, of production equipment in recently built 300 mm Fabs
· To clarify the meaning of conventional dimensions (current E72) and alternatives
· To provide guidance how alternative standard value or options should be agreed upon between the user and suppliers
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Japan PIC TC Chapter,
PIC Maintenance Global TF
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4. Formation Date:
(TF formed on)
Task Force formed on:
03/29/2022
Task Force approved by Committee/GCS on:
03/29/2022
5. Comments
None.
