TFOF for Process Control System NA
SEMI International Standards
Date Prepared:
Revised (if Applicable): 11/01/2007

Name of Task Force (TF): Process Control System NA

Global Technical Committee: Information & Control
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)
To define an online Process Control System (PCS) Architecture Framework inclusive of run to run, fault detection and classification, and statistical process control capabilities.
2. Scope: (Define the specific activities that the TF will conduct.)
* Define the detailed capabilities:
- Run to Run Control (APC)
- Fault Detection and Classification (FDC)
- Statistical Process Control (SPC)
- Specification of PCS link to Yield Learning
- Specification of PCS link to Design for Manufacturability (DFM)

* Evaluate Options:
- Create a new standard
- Other existing Technologies / Standards efforts
* Select Optimal Approach
* Define development timeline
- Provide implementation mappings:
- Result will be mapped on to industry-standard software technologies
Scope includes protocols, data format / structure, architecture considerations.
Expect to start via teleconferences between October 2001 and March 2002. First face to face meeting at the SEMI Winter Meetings in March 2002.

- Address/review the gathered set of requirements for improved process control
- Map the requirements to existing and pending SEMI standards
- Identify areas where new SEMI standards are needed
- Develop standards/guidelines to address the requirements.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
CIM FW TF / APC FW TF – determine if there is scope overlap, merge efforts if warranted
Sensor Bus TF’s – potential technology and interface requirements sharing

4. Formation Date:(TF formed on)

Task Force formed on: 10/18/2001
Task Force approved by Committee/GCS on: