SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/23/2018Revised (if Applicable):

Document Number: 6370
SNARF for: New Standard: Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface

Originating Global Technical Committee: HB-LED
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: HB-LED Equipment Communication Interface
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The existing SEMI standards of communication software are generic to all SEMI related industries, especially to semiconductor wafer FABs and equipment vendors.
However, LED FABs use Susceptors, processing wafers in different ways comparing to semiconductor wafer FABs. Sharing the same communication software standards without LED FAB specifics causes LED FAB communication software difficult to communicate with LED equipment software and vice versa.

It is necessary to make new standards, based on SEMI communication software standards, for LED industry, to unify the protocols between LED FAB communication software and equipment software. The automation of LED fabrication with MOCVD will be easier to implement, and the guidance of communication software will be easier to follow by both FABs and MOCVD vendors.
This standard can effectively prevent the different interpretation of the Wafer FAB communication standards by LED FABs and equipment makers. It will clarify the definitions of uncertain usages, and guide the FABs and equipment makers to follow.

Once LED FABs and equipment vendors follow this standard, it saves a lot of effort on redesign the communication software caused by non-compliance of the communication requirements. It may take 6 or more months for an equipment vender to redesign the communication software to meet the communication requirements, or 12 or more months for LED FAB to redesign the FAB host software communicating to all equipment used in its FAB.

The return on investment is estimated based on the improvement of HB-LED manufacturing efficiency, system down time reduction, data traceability and product quality improvement at million dollars per FAB



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
- Concept of susceptor: different from Carrier of semiconductor wafer FABs, but can be defined as a carrier with one substrate.
- Concept of wafer: different from substrate of semiconductor wafer FABs. LED wafers can be represented as VIDs such as name, location, temperature, reflectance and curvature, etc.


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 02/20/2018b. 1st Draft by: 10/01/2018
c. (Optional) Informational Ballot by: 03/01/2019d. Letter Ballot by: 04/01/2019
e. TC Chapter Approval By:04/01/2020

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
Information & Control Committee, Automation Technology Committee, NA HB-LED Equipment Communication Interface

b. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Automation Technology, Information & Control
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 2018/3/27
Member Review End Date: 2018/4/10

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS04/18/2018
Recorded in TC Minutes04/28/2018

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on


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