SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
10/24/2011
Revised (if Applicable):
Name of Task Force (TF):
NA MEMS/NEMS Committee
Global Technical Committee:
MEMS / NEMS
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
The NA MEMS/NEMS Committee will perform maintenance on MS Standards that do not belong to a specific, chartered MEMS task force.
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2. Scope:
(Define the specific activities that the TF will conduct.)
Perform 5-Year Review for MEMS Standards.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
3DS-IC Bonded Wafer Stacks Task Force
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4. Formation Date:
(TF formed on)
Task Force formed on:
10/24/2011
Task Force approved by Committee/GCS on:
10/24/2011
5. Comments
None.
